Description
High vacuum chamber, approximately 25”(height)x 14”(depth) x13”(width), with front door that will seal against a Viton O-ring. Standard ports include pumping/gauge ports, and feedthrough ports for heater/temperature sensor and electrical current connector for internal electromagnet.

Features
* View port in center of door on the front panel of the vacuum chamber

* Standard 19-inch wide electronics racks for housing all of the electronics components of the system including power distribution, power suppliers, etc.

* 6” NdFeB magnet pole pieces (2) mounted on soft-iron magnetic frame structure designed for magnetic field enhancement using finite-element analysis

* Magnetic field up to 0.4 Tesla with 2% magnetic field uniformity over 2” sample cartridge

* Enclosed sample metallic cartridge box capable of holding ten 2” silicon wafers

* Integrated and surround heaters for sample cartridge box capable of 450 C with temperature uniformity of better than 1.5%

* Build-in thermal couple monitoring interior sample cartridge box

* Thermal isolation unit using Ceraseal to prevent heating the NdFeB magnets

* Temperature controller with programmable annealing profiles

* Power supply for sample cartridge heater

* High vacuum cryopump capable of high vacuum

* Gate valve

* Mechanical pump with oil-mist filter

* Thermal couple high vacuum pressure gauge

* Low vacuum gauge

* Safety features include an EMO button on the front of the main electrical rack and interlocks.

* A complete facilities list detailing system layout and electrical requirements will be provided after discussion with customer and 6 weeks ARO.

* Training will be provided at Micro Magnetics up to two days before shipping the unit to customer.

Applications

Technical Specification